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High filtration precision
This is a gas filter compatible with the integrated gas system manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications.
Developed a gas filter with a high filtration accuracy of 0.003 μm in a consistently stable state.
This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It is capable of high-temperature baking at 200°C to ensure the removal of impurities such as water and oxygen.
Filtration accuracy
This is an inline ceramic gas filter manufactured by Pureon Japan Co., Ltd., used in semiconductor manufacturing gas lines and other applications.
Using Hastelloy for all materials.
This is a gas filter manufactured by Purelon Japan Co., Ltd. It efficiently removes particles larger than 0.003 μm even under high flow rates and high differential pressures. We offer a wide range of products from low flow rates of about 10 L/min to medium flow rates of about 250 L/min. Compared to conventional metal filters, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size.
Stable filtration performance
The filter membrane is made of a two-layer structure of PTFE, which has almost no elongation due to aging or vibration, ensuring stable filtration performance. A total number of particle counters using the condensation nucleus method have been used to conduct particle capture tests for particles as small as 0.003 μm.
The filter membrane is made of PTFE with a two-layer structure, exhibiting almost no elongation due to aging or vibration, and has stable filtration performance.
We are conducting particle capture tests for particles of 0.003 μm using a total number of condensation nucleus particle counters.
Achieving low pressure loss while maintaining a high filtration precision of 0.003μm!
This is an inline ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines. It can handle approximately twice the flow rate with the same external dimensions as the conventional PGF series.
The SPC series is designed to be ultra-compact (φ21×84mm) and lightweight (90g).
It is ideal for cylinder cabinets and devices with limited installation space.
It is suitable for use in primary bulk gas lines with a flow rate of 500 L/min to 3,000 L/min.
This is a ceramic gas filter manufactured by Pureon Japan, used in semiconductor manufacturing gas lines and other applications.
Significantly improve yield.
This is a gas filter manufactured by Purelon Japan Co., Ltd. All filter components are made of SUS316L, ensuring high corrosion resistance and excellent heat resistance without the risk of secondary generation of substances. When nitrogen gas (N2) is flowed at an inlet pressure of 0.2 MPa, the outlet pressure loss is △0.05 MPa, achieving a flow rate of 90 SLM. Additionally, under steady flow and pulsation conditions, a filtration precision of 0.003 μm has been confirmed using CNC, significantly improving yield in submicron ULSI manufacturing.
Supports a wide range of filtration precision.
This is a gas filter manufactured by Purelon Japan Co., Ltd. It supports a wide range of filtration precision from 0.1 to 10 μm under steady flow and pulsation conditions. Corrosive materials are not used in the filter components, so there is no risk of corrosion or secondary byproducts. By using a dedicated baking heater in conjunction, we achieved a degassing (moisture content) of 1.2 ppb in APIMS measurements. With continued use, levels down to 0.1 ppb are possible.
Compact size for handling higher gas flow.
This is a gas filter manufactured by Purelon Japan Co., Ltd. It uses SUS316L for all materials. It efficiently removes particles larger than 0.003μm even under high flow rates and high differential pressures. Compared to conventional products, it has extremely low pressure loss and can handle higher flow rates of gas in a compact size. We offer a wide range of options from low flow rates of about 10L/min to medium flow rates of about 250L/min.
The filter membrane is made of PTFE and has a two-layer structure.
This is a gas filter manufactured by Purelon Japan Co., Ltd. The filtration membrane is made of PTFE with a two-layer structure, exhibiting minimal elongation due to aging or vibration, and provides stable filtration performance. A particle capture test for 0.01 μm particles has been conducted using a fully calibrated condensation nucleus particle counter.
Ensure a flow rate of up to 1,000 lpm.
■Compact and High Flow Rate This is a standard-sized inline gas filter that allows for high flow rate filtration. High Particle Removal Performance ■It efficiently removes particles larger than 0.003μm. ■Excellent Corrosion Resistance All filter media and support materials are made of fluoropolymer, and the housing is made of SUS316L material. *It can be used for a wide range of applications, including semiconductor manufacturing equipment and bulk gas supply lines for PV.
